County picked up their third home victory of the season thanks to a wonder goal from Rocco Quinn which ended Aberdeen's six-match unbeaten run.
There was not much to pick between the teams but Quinn notched the winner seven minutes into the second half when the midfielder found the back of the net with a stunning strike.
The victory lifted Ross on to 10 points, four points behind fourth-placed Aberdeen.
McInnes said: "We are obviously disappointed with the outcome, I didn't think we got to the levels we are capable of. There wasn't enough tempo or pace generated from us until we went behind.
"If we started the game the way we finished it we could have had a better outcome.
"We weren't out-fought or out-worked there was plenty of honesty from the players throughout. But the disappointing part of today was we didn't cause enough problems to the opposition and bring the level of performance we are capable of.
"The players' desire and willingness to get a goal was a bit rushed I would have liked to have seen a bit more poise and a bit more control.
"At the very least we showed enough tempo in the last 20 minutes or so to go and play in the opposition last third. But we still didn't work the goalkeeper. It's disappointing, we are better than we showed today.
"Any time we play come three o'clock we are ready to impose ourselves and do what we are good at in the game and not let the game by-pass us."
McInnes said he felt for the big away support: "We had a great travelling support but unfortunately today we didn't do enough to send them home happy. Results like today's suggest there is still work to be done," he said.
Delighted County manager Derek Adams said: "It was a very good victory, thoroughly deserved. If we were two or three up at the break it would have been fair.
"I thought we played very well today. Aberdeen got out of the game what they deserved - nothing.
He added: I thought over the 90 minutes we were strong and good on the ball. We knew Aberdeen would come at us late on with the long throws and the long balls into the box.
"But over the 90 minutes I'm delighted, I think that's us four points off Aberdeen now."